NTK Ceratec – Chuck Repair Service (6”, 8” and 12”)

The chuck repair service is dedicated to wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.

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Overview

Features

Specifications

Outline of Wafer Chuck Regeneration

– Refurbishing chuck surfaces

  • Improvement of surface roughness
  • Restoration of flatness
  • Reshaping of dimples


– Refurbishing degraded sections

  • Rejoining of metal foil and ceramics
  • Refilling of joining layers


– Refurbishing air leaks

  • Replacing O-rings

Key Features

  • Inspection system before and after Refurbishing using a wide array of inspection facilities
  • Ability to completely remove deposits during Refurbishment
  • Ability to produce ceramic spray chucks in addition to ceramic chucks

Key Industries

  • Electronics
  • Semiconductor, Solar & Electronics

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NTK Ceratec

NTK CERATEC’s core business revolves around ceramics and solutions using ceramic materials based on the latest processing and coating technology….

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      Emmanuel Milan, Product Manager

      DKSH Technology 1475 Quai du Rhone 01702 Miribel France

      +33 4 7855 7860

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