NTK Ceratec – Chuck repair service (6”, 8” and 12”)
The chuck repair service is dedicated to wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.
• for photolithography on ASML, Nikon, Canon, …
• for Etching/CVD on Novellus (LAM), SPTS, Anelva, Nissim, …
Please, consult us for machine compatibilities and designs.
Key Features
- Inspection system before and after Refurbishing using a wide array of inspection facilities
- Ability to completely remove deposits during Refurbishment
- Ability to produce ceramic spray chucks in addition to ceramic chucks
Outline of Wafer Chuck Regeneration
– Refurbishing chuck surfaces
- Improvement of surface roughness
- Restoration of flatness
- Reshaping of dimples
– Refurbishing degraded sections
- Rejoining of metal foil and ceramics
- Refilling of joining layers
– Refurbishing air leaks
- Replacing O-rings
Key Industries
- Electronics
- Semiconductor, Solar & Electronics
NTK CERATEC’s core business revolves around ceramics and solutions using ceramic materials based on the latest processing and coating technology….
