NTK Ceratec – Electrostatic Chuck

Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics.

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Overview

Features

Specifications

NTK Ceratec can provide electrostatic chucks and ceramic heaters catering to user needs by utilizing several material technologies. We can also provide services for the development and experimental production of electrostatic chucks and ceramic heaters according to region of use such as plasma and electron beam environments.

Key Features

  • Electrostatic chuck with heater (ESC/Heater) – Material: AIN (Aluminum nitride)
  • Electrostatic chucks (ESC) – Material: Al2O3(Alumina) plate/ Thermal sprayed Al2O3
  • Ceramic heater – Material: AIN (Aluminum nitride)

Key Industries

  • Semiconductor, Solar & Electronics
  • Electronics

More Products

NTK Ceratec

NTK CERATEC’s core business revolves around ceramics and solutions using ceramic materials based on the latest processing and coating technology….

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      Emmanuel Milan, Product Manager

      DKSH Technology 1475 Quai du Rhone 01702 Miribel France

      +33 4 7855 7860

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