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OCTOPUS II – PECVD/PVD system can cover a broad range of deposition job constellations, up to 6 deposition modules
OCTOPUS II – PECVD/PVD system can cover a broad range of deposition job constellations, up to 6 deposition modules
The scia Batch 350 is designed for homogeneous coating of several 3‑dimensional shaped substrates in one batch. Typical applications are biocompatible films for medical objects. Â
The scia Batch 350 uses a RF parallel p…
The scia Batch 350 is designed for homogeneous coating of several 3‑dimensional shaped substrates in one batch. Typical applications are biocompatible films for medical objects. Â
The scia Batch 350 uses a RF parallel plate arrangement with rotation of each substrate for a homogeneous coating of all sides. The system is also available with an additional DC bias applied to the substrate holder.
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