SET – NPS300
Optimized for the production of nanostructures, the Nano imPrinting stepper Stepper NPS300 is the first ever tool able to combine Hot Embossing and UV-NIL on a same platform. The NPS300 is able to print sub-20 nm geometries with an overlay accuracy of 250 nm, when in-situ alignment is performed.
NPS300’s flexible architecture offers an excellent process reproducibility and a unique ability to pattern large areas, in a sequential step and repeat mode on wafers up to 300 mm. It enables the low cost manufacturing of large stamps featuring repeated patterns.
Key Features
- Nanoimprinting lithography tool various replication processes
- Step & Repeat on wafer up to 300 mm
- Inert gas injection for faster UV-NIL process
- High accuracy, low volume and programmable fluid dispense
- Automatic stamp pick-up
- Air bearing technology and granite structure ensure long-term stability and reliability
Technical Specifications
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Applications
- Photonic devices
- High precision micro-optical arrays and gratings
- CMOS-MEMS integration
- High resolution OLED displays
- High density HDD’s for mobile storage
- Other emerging techniques
Key Industries
- Semiconductors
- Photonics
- OLED Displays
SET, Smart Equipment Technology, is a world leading supplier of High Accuracy Flip Chip Bonders and versatile Nanoimprint Lithography (NIL)…
