NTK Ceratec – Electrostatic Chuck
Electrostatic chucks and ceramic heaters can be produced by sintering materials with metallic electrodes arranged in the ceramics.
Available in :
NTK Ceratec can provide electrostatic chucks and ceramic heaters catering to user needs by utilizing several material technologies. We can also provide services for the development and experimental production of electrostatic chucks and ceramic heaters according to region of use such as plasma and electron beam environments.
Key Features
- Electrostatic chuck with heater (ESC/Heater) – Material: AIN (Aluminum nitride)
- Electrostatic chucks (ESC) – Material: Al2O3(Alumina) plate/ Thermal sprayed Al2O3
- Ceramic heater – Material: AIN (Aluminum nitride)
Key Industries
- Semiconductor, Solar & Electronics
- Electronics
More Products
NTK CERATEC’s core business revolves around ceramics and solutions using ceramic materials based on the latest processing and coating technology….