InnoLas Solutions – Linear Table Machine – LINEXO
LINEXO is a versatile laser processing workstation designed for high-precision applications in the electronic, precision engineering, and photovoltaic industries.
It is often used in R&D environments, as well as production of smaller substrates as e.g. ceramic PCBs.
Technical Specifications
| Applications | Micro Via Drilling, Routing, Depaneling, Micro Structuring, Selective Ablation, Cavity Formation |
| Accuracy | < +/-10 μm abs. < +/-2 μm repeatability |
|---|---|
| Substrate | Dimension up to 610 x 410 mm Thickness > 50 μm PCB, ceramic, silicon, metal |
| Available laser sources | Wave length: 9.4, 10.6 μm (CO2), 1064, 1030, 532, 515, 355 nm Pulse: μs, ns, ps, fs |
| Dimensions | 1700 x 2100 x 2700 mm |
Key Features
ILS-LT
- Fixed optic or scanner setup
- Single or dual process heads
- Process gas (N2 , O2, Ar, …)
- Processing one or more substrates in parallel
- Automatic camera calibration
- Automated routines for reference runs
- Automated process control
- Automated vision system for precision alignment
- and scaling, offset, trapezoidal and rotation
- compensation
- Stand alone and production line integrated system
Key Industries
- Semiconductor, Solar & Electronics
InnoLas Solutions was founded in October 2013 as a demerger of InnoLas PV and electronic business and looks back on…
