Solarius – AOP
The AOP platform is the most flexible and modular Solarius solution for all kinds of customized measurement tasks. Depending on the indivisual task, it can be equipped with different 3D measuring sensors out the entire available technology portfolio, many sizes of motion systems and customized software. Its flexibility supports a wide variety of applications and working environments and can be tailored to meet each customer’s requirements.
The modular AOP platform can be equipped with all availabe non-destructive measurement technologies, including chromatic confocal point and line sensors, confocal area sensors, laser line triangulation sensors, interferometric sensors, and 2D camera systems. Height resolutions down to the single nm are supported same as high speed measurements of up to 80,000 points in 130 milliseconds. Vibration isolation and a lateral measurement range up to 500 mm or more make the AOP the best solution for all kinds of measurement tasks.
Technical Specifications
Lateral Working Range | up to 500 mm x 500 mm | |
Vertical Working Range | 100 µm to 80 mm | |
---|---|---|
Lateral Resoultion | 1 µm up | |
Vertical Resolution | 1 nm up | |
For further details, please refer to enclosed brochure. |
Solarius AOP Custom
Key Features
- Modular Flexibility: It supports various 3D measuring sensors and motion systems, making it adaptable for different customized measurement tasks.
- High-Resolution Measurement: Provides lateral resolution up to 1 µm and vertical resolution down to 1 nm for precise measurements.
- Speed and Range: Capable of measuring up to 80,000 points in just 130 milliseconds with a lateral working range of up to 500 mm, catering to high-speed, large-scale measurement needs.
Sensor Types
- Chromatic confocal point sensors
- Chromatic confocal line sensors
- Confocal matrix sensors
- Interferometric matrix sensors
- Focus variation matrix sensors
- Point triangulation sensors
- Line triangulation sensors
Key Industries
- Semiconductor, Solar & Electronics
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