Nordson Electronics Solutions – Automated Plasma Treatment System – FlexTRAK® SHS

Built upon Nordson Electronics Solutions’ patented plasma technology, the FlexTRAK®-SHS is our latest fully automated plasma system incorporating a high-capacity F3-S chamber, to provide high uniformity and increased productivity. The chamber architecture remains the same as the smaller FlexTRAK platform, providing a seamless transition between chambers as production demands more capacity.

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Overview

Features

Specifications

Industry-Leading Throughput and Reliability

Technical Specifications

W x D x H – Footprint2314 x 1935 x 1787 mm (2293 H mm with light tower)
91.1 x 76.2 x 70.5 in (90.3 H in with light tower)
Net Weight1305 kg (2,871 lbs)
Chamber VolumeF3-S chamber: 9.6 liters (585 in³)
F3 chamber: 5.5 liters (338 in³)
Powered Electrode Dimensions W x DF3-S chamber: 305 x 610 mm (12 x 24 in)
F3 chamber: 305 x 305 mm (12 x 12 in)
RF Power: Standard WattageF3-S chamber: 1000 W
F3 chamber: 600 W
RF Power: Frequency13.56 MHz
Gas Control: Maximum Number of MFCs4
For further details, please refer to enclosed brochure.

Key Features

Industry-Leading Throughput

  • Large capacity F3-S process chamber
  • Simultaneous strip buffering and processing
  • Advanced automation and magazine splitting capabilities

New Product Development

  • Advanced material handling
  • Ability to accommodate increasingly larger strip sizes
  • Sophisticated jam detection

Application Flexibility

  • Plasma chamber effectiveness
  • Configurable process chamber
  • Versatile treatment modes

Key Industries

  • Semiconductor, Solar & Electronics

Key Applications

  • Pre-wire bond plasma treatment on semiconductor package substrates and lead frames
  • Pre-underfill plasma treatment on flip chip packages
  • Pre-mold plasma treatment on semiconductor package substrates and lead frames
  • Plasma treatment of semiconductor package substrates and lead frames for improved adhesion
  • Removal/reduction of oxidation on lead frame

More Products

Nordson Electronics Solutions

Nordson Electronics Solutions is a leading provider of plasma processing technology to various industries such as semiconductor, PCB, microelectronics, solar,…

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  • FlexTRAK® SHS Brochure


  • MALAYSIA

    DKSH Technology Sdn. Bhd.
    No. 108-B-01-08, Setia Spice Canopy, Jalan Tun Dr. Awang,
    11900 Bayan Lepas, Penang
    Malaysia

    +60 4 645 2672

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  • SINGAPORE

    DKSH Singapore Pte Ltd
    625 Lorong 4 Toa Payoh, #03-00
    319519 Singapore
    Singapore

    +65 6962 3121

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  • THAILAND

    DKSH (Thailand) Limited
    2106 Fantree 4 Building, Sukhumvit Road,
    Phrakhanong-Tai, Phrakhanong 10260 Bangkok
    Thailand

    +66 2 639 7000

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  • VIETNAM

    DKSH Technology Co.,Ltd
    5th Floor, Viettel Complex, 285 Cach Mang Thang Tam Ward 12, District 10
    70000 Ho Chi Minh City
    Vietnam

    +84 8 38125806

    Contact Now

  • VIETNAM

    DKSH Technology Co.,Ltd
    5th Floor, Viettel Complex, 285 Cach Mang Thang Tam Ward 12, District 10
    70000 Ho Chi Minh City
    Vietnam

    +84 8 38125806

    Contact Now