ATV – SRO-706 Getter
ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal Getter activation.
With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. The sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process.
The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.
Key Features
- Programmable solder reflow oven
- Thermal reactor
- High vacuum package lid sealing system
- Thermal getter activation
Technical Specification
| Footprint | 960 x 720 x 1340mm (LxWxH) |
| Weight | 240kg (minumum configuration) |
| Working Height | 950 – 1050mm adjustable |
| Heated Area | 313 x 240mm |
| Chamber Lid Open/Closing | Manual open/close; Automatic lock/un-lock |
| Heating Method | 2 IR Lamp arrays within quartz tubes |
| Cooling Water Supply | Cold wall technology: Inlet max. 4bar; diff. pressure min. 2bar |
| For further details, please refer to enclosed brochure. |
Key Industries
- Semiconductor, Solar & Electronics
Founded in 1982 ATV Technologie GmbH is an international player in the field of micro electronics focussing on manufacturing and…
