ADT – Dicing Peripheral
ADT dicing peripheral is a precision cutting tool used in semiconductor and electronics manufacturing for precise and efficient dicing of wafers and substrates into smaller chips. It features high accuracy, low kerf loss, and excellent edge quality for optimal yield and reliability.
ADT offers dicing peripheral equipment and accessories, such as auto wafer cleaner, water recycling system, spindle water chiller, semi-auto wafer mounter, and more.
Two main product groups:
- Water Treatment Systems: Complete set of solutions for water recirculation and process stabilization.
- Wafer Handling Systems: Complete set of wafer mounting, cleaning, and curing solutions.
Key Features
- Used for dicing wafers and substrates into smaller chips
- High accuracy and low kerf loss for optimal yield
- Compatible with a wide range of materials and thicknesses
- Robust and durable design for long-term use
- Offers advanced automated blade height adjustment and real-time monitoring.
Available Models
Technical Spcifications
| Specifications | 996-8″ | 996-12″ |
|---|---|---|
| Max workpiece size | Ø 200 (8”) mm | Ø 300 (12”) mm |
| Temp control chuck heater | <65 °c | <65 °c |
| Dimensions (W x D x H) | 420 x 860 x 370 mm3 | 550 x 1000 x 310 mm3 |
| Air pressure | 45 bar | 60 bar |
Designed for manual mounting of workpieces on tapes. Supporting various types of dicing tapes and standard frames. Can be customized for multiple substrates (multi-panel) and irregular frames.
Technical Spcifications
| Specifications | Value |
|---|---|
| Flow capacity | <20 L/min |
| Supply pressure | <5 bar |
| Dimensions (W x D x H) | 620 x 1280 x 1720 mm3 |
| Air pressure | 6-8 bar |
Designed for closed-loop, uniform supply of cutting water. It recycles drain water thru filtering, cooling and pumping to maintain required purification, temperature and flow levels for optimized dicing, cost saving and environment care.
Technical Spcifications
| Specifications | 997 | 997L |
|---|---|---|
| Max workpiece size | Ø 200 (8”) min | Ø 300 (12”) min |
| Spinner velocity range | 50-3,000 rpm | 50-2,000 rpm |
| Dimensions (W x D x H) | 410 x 625 x 946 mm3 | 502 x 809 x 946 mm3 |
| Weight | 120 Kg | 200 Kg |
Designed for after-dicing workpiece cleaning and drying. Equipped with a spinning chuck table and a rotating washing/drying arm. The arm can be configured with an atomizing cleaning nozzle or a high pressure nozzle to cope with a wide range of cleanliness requirements.
Technical Spcifications
| Specifications | 967 | 967L |
|---|---|---|
| Supported tapes | Dicing Blue-tapes / UV tapes | Dicing Blue-tapes / UV tapes |
| Max Workpiece size | Ø 200 (8”) mm | Ø 300 (12”) mm |
| Dimensions (W x D x H) | 655 x 590 x 560 mm3 | 791 x 706 x 557 mm3 |
| Air pressure | 6-8 bar | 6-8 bar |
Designed for quality, hands-free mounting of workpieces on tapes.
It features fast, consistent, precise and economic mounting at an exceptional cost-performance.
Technical Spcifications
| Specifications | 995-8″ | 995-12″ |
|---|---|---|
| Max. frame Diameter | 300 mm | 400 mm |
| Exposure area | 250 x 250 mm2 | Ø430 mm2 |
| Dimensions (W x D x H) | 510 x 450 x 120 mm3 | 645 x 526 x 180 mm3 |
| Weight | 20 Kg | 30 Kg |
Designed for after dicing UV tape curing to reduce the adhesive strength for ease of workpiece removal.
Technical Spcifications
| Specifications | Value |
|---|---|
| Temperature range | 8-35 °c |
| Stability | ±0.1 °c |
| Dimensions (W x D x H) | 526 x 360 x 555 mm3 |
Designed for closed-loop supply of spindle cooling water. It maintains stable, temperature-controlled water; an important factor for achieving high dicing accuracy and quality.
Technical Spcifications
| Specifications | Value |
|---|---|
| Resistivity setting range | 0.1-1 MΩ/cm |
| Water capacity* | 3-10 L/min |
| Dimensions (W x D x H) | 190 x 446 x 365 mm3 |
| Weight | 6-8 Kg |
Designed for decreasing the resistivity of deionized (DI) water to a predefined level. Aimed at preventing particle adhesion and damage caused by static discharge during the dicing process.
Key Industries
- Semiconductor, Solar & Electronics
Advanced Dicing Technologies (ADT) specializes in the development and manufacturing of systems, blades and processes used in the dicing of…
