Optimized for the production of nanostructures, the Nano imPrinting stepper Stepper NPS300 is the first ever tool able to combine Hot Embossing and UV-NIL on a same platform. The NPS300 is able to print sub-20 nm geometries with an overlay accuracy of 250 nm, when in-situ alignment is performed. Its flexible architecture offers an excellent process reproducibility and a unique ability to pattern large areas, in a sequential step and repeat mode on wafers up to 300 mm. It enables the low cost manufacturing of large stamps featuring repeated patterns.

VON ARDENNE is the partner of choice, if you are looking for coating solutions for all current and future technologies for high-efficiency solar cells such as the heterojunction cell technology (HJT). Considerably improved contact structures compared to today’s standards are an essential feature of these cells. Another crucial aspect is the right key technology for depositing these structures on silicon wafers: Physical vapor deposition (PVD), a technology VON ARDENNE has perfected for more than 60 years. However, the potential of PVD is far from exhausted.