NTK Ceratec – Chuck repair service (6”, 8” and 12”)
The chuck repair service is dedicated to wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.
• for photolithography on ASML, Nikon, Canon, …
The chuck repair service is dedicated to wafer chucks damaged in device manufacturing processes to a state equivalent to new using our vast knowledge of ceramics.
• for photolithography on ASML, Nikon, Canon, …
• for Etching/CVD on Novellus (LAM), SPTS, Anelva, Nissim, …
Please, consult us for machine compatibilities and designs.
